Requirement: Measure the thickness of graphite under the film

As shown in the figure above, first circle the measured area, the ink thickness measurement on the film, try to choose the ink near the graphite for measurement, due to the opacity of the measurement object, in order to ensure accuracy, the use of a dual-axis shooting platform

The dual-axis projection platform adopts two side heads, and the light spots of the two probes are coincident by centering, so as to ensure the accuracy of the measured area.

  (Accuracy of measured area)

(average value)

The regional accuracy of the four products can be obtained from the above figure. The dynamic repetition accuracy of product 1 for 13 repetitions of position 1 is 0.135 microns, the dynamic repetition accuracy of position 2 for 13 repetitions is 0.053 microns, the dynamic repetition accuracy of position 3 for 13 repetitions is 0.073 microns, and the dynamic repetition accuracy of position 4 for 13 repetitions is 0.175 microns. The measurement value of the spectral confocal sensor will have a fixed deviation from the measurement value of the contact altimeter, which can be eliminated by increasing the fixed compensation value

This time, the side head of the vertical technology D15A32R02S3 is equipped with a dual-channel controller. The maximum measuring range of the side head is 0.65MM, the resolution is 2nm, the minimum spot diameter is 3.5um, the working distance is 6mm, and the maximum measuring Angle is ±32°