white Light Interferometry 3D SurfaceProfiler

The product is composed of film thickness meter host, PC software of upper computer and optical fiber. When a quasi-monochromatic beam of parallel light is irradiated into the multilayer film, the light waves will be refracted and reflected back and forth between the first and n layers for many times to form a plurality of coherent beams. These coherent beams carry the coherent signal of the multilayer film and return along the original path after the phase-dry superposition. When quasi-monochromatic light of different wavelengths irradiates the film, the interference signals are different. If a beam of quasi-monochromatic light containing a variety of wavelengths is used to illuminate the film, the interference signal of each band is extracted, and the algorithm of OCD's independent intellectual property rights is used for inversion calculation, each layer of thin film material can be obtained.