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Spectral confocal semiconductor field measurement - convex height measurement, wafer TTV measurement, warping

In the year 2022, the semiconductor industry is undoubtedly one of the fastest growing industries. Today, semiconductors are widely used in electric vehicles, data centers, smartphones, and factory automation equipment. As one of the national suppliers of measuring equipment and technology, the semiconductor industry is also the area of focus of the company in the past, especially in the round test and detection of contact or non-contact products, and has accumulated rich experience. Let's take a look at it with Riser Technology

In the semiconductor manufacturing process, the spectral confocal displacement sensor measurement equipment can be used for detection of vision and thickness at the same time, which greatly improves the product yield. The point spectral confocal sensor of Lihe is used to measure distance and appearance shape thickness, TTV, warping, and 2.5D image measurement accuracy can reach up to 0.1μm. And there are many models and large measurement angles, which can meet the needs of customers to the maximum extent


The spectrometer confocal displacement sensor uses multiple prism dispersing components, and the light energy utilization is more than 2 times higher than other dispersing principles. Linearity is more than 2 times higher. Double shell double damping structure, spectrum module shell by the whole metal hollowing out, good rigidity and stability, greatly reduce the vibration of the machine work and external heat conduction, reduce the sensor vibration damage or misalignment when the machine transport, electromagnetic shielding performance is good, good heat dissipation. Modular LED light source. Saving controller with multi-channel version reduces costs.

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