As a particularly popular high-precision sensor in recent years, spectral confocal displacement sensor has more advantages than laser displacement sensor spectral confocal, the following small series of vertical instrument technology will give you a brief introduction.

The first is the smaller measurement blind area, the coaxial measurement configuration avoids the Angle limitation of the laser triangulation sensor, reduces the measurement blind area, and is suitable for the measurement of complex fine structures (such as deep trench structures, etc.). Higher precision size and displacement reproducibility.

Secondly, the objective lens developed by the high-sensitivity optical non-contact measurement spectral confocal displacement sensor can realize the imaging spot as small as 10 microns, while improving the measurement linear accuracy.

The stray light suppression optimized spectrometer and high-brightness color light source customized for the spectral confocal displacement sensor can greatly improve the measurement sensitivity of the sensor, and can detect the extremely weak light intensity returned from the surface (such as transparent objects such as thin films) to complete the measurement.

The spectral confocal sensor is suitable for the measurement of a variety of materials and can guarantee the measurement performance of different materials, while supporting the multi-layer thickness measurement of multi-layer film/glued glass.

The probe installed in the measurement site is a pure optical device, which is connected to the controller through optical fiber, so that the influence of electromagnetic interference on the measurement accuracy can be avoided. The probe diameter can be designed up to Φ10mm for side-by-side measurements at multiple critical locations. At the same time, the probe can be designed to measure the Angle of ±60° to meet the measurement of the surface.

glass

Different materials can be accurately measured:

1, transparent material can achieve high-precision measurement, laser displacement sensor is not capable.

　　2 Pits and segment differences can be measured without dead Angle

　　3 The transparent and mirror body can be correctly measured even if the measurement height of the transparent and mirror body changes, the same measurement point can be measured without position deviation.

　　After listening to the introduction of the small edition of the vertical instrument, I believe that the advantages of the two have a clear understanding, more about the advantages of spectral confocal displacement sensor welcome to pay attention to the vertical instrument technology.