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2021-12-15

Characteristics of spectral confocal sensor measurement

The spectral confocal sensor does not need to be re-installed or adjusted for each material. For the measured object with a variety of materials, only one sensor can be used, one installation method can be stable measurement, and the junction of different materials can also be stable measurement. The spectral confocal displacement sensor has very high scanning accuracy and can measure roughness in accordance with ISO2587 international standard. Laser displacement sensor can not achieve roughness measurement, and Japanese and domestic spectral confocal sensors can not achieve roughness measurement because the spot is too large and the resolution is not enough.

Characteristics of spectral confocal sensor measurement

1. Comparison of traditional triangulation method

Triangulation is to measure the distance change of the object by using the change of the position of the light spot on the sensor (CCD/CMOS). Although the error can be reduced by calculating the characteristic quantity such as peak value or center of gravity from the photosensitive waveform, in principle, different materials or the tilt of the object will cause the position deviation or waveform confusion of the photosensitive waveform, resulting in measurement errors

2, measuring point dislocation problem

When using the traditional triangulation method, the measurement position or spot size will change with different height. The coaxial confocal principle of the confocal displacement sensor can ensure that even if the measured object is tilted or warped, it can also be measured with high precision, and the measurement point will not change.

3, can stably measure any material surface

4, super Angle characteristics, the maximum measurable Angle of 87 degrees

Traditional triangulation ranging method coaxial confocal ranging method

When the tilt Angle of the measured object is too large, the luminous aberration image has no aberration interference due to its coaxial confocal principle.

Even if there is a measured value, it may be very different from the true value. Even if the object to be measured has a large inclination, the image measurement accuracy will not be.

5, for mirror, transparent, semi-transparent body surface can also have super Angle characteristics

The traditional triangulation method, when measuring mirror body, has strict requirements on the installation Angle of sensor. In applications where multi-head measurements of glass or flexible sample thickness are used, high precision Angle adjustment of individual sensors must be made during installation. With confocal displacement sensors, high-precision measurements can be made without strict Angle adjustment. Even the pulsation of the measured object in the process of movement will not have a large impact on the measurement.

6, can simultaneously measure and output displacement and thickness

7, the flatness and thickness of transparent parts can be measured at the same time


The surface of mirror, transparent and semi-transparent body can also have strong Angle characteristics. The traditional triangulation method has harsh requirements for the installation Angle of the sensor when measuring the mirror body. In applications where multi-head measurements of glass or flexible sample thickness are used, high precision Angle adjustment of individual sensors must be made during installation. With confocal displacement sensors, high-precision measurements can be made without strict Angle adjustment. Even the pulsation of the measured object in the process of movement will not have a large impact on the measurement.