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Spectral confocal displacement sensor D15A32 series lens

With a diameter of 15mm, the small size can meet the high resolution of most installation scenarios, and is suitable for application scenarios with small size differences but high precision requirements The large Angle feature can satisfy more parts of the tested object with large Angle shape Ultra-small spot size, resulting in higher linear accuracy and higher resolution, suitable for measuring high resolution roughness, or linear accuracy requirements, such as the width of the blade and other applications

Desc

Footage:

Outside diameter


D


Maximum design Angle A

Maximum range R *

Minimum spot diameter S*


(C50 Fiber)


Working distance C

Resolution *

Total Length L

unit

mm

The degree of

mm

um

mm

nm

mm

D15A32R06S3

15

±32°Mirror surface

0.65

3.4

6

2

140.5




(±0.32)





D15A32R03S3



0.32


6.2

1





(±0.16)





D15A32R01S3



0.16


6.2

1





(±0.08)





* Range, Angle, spot size and resolution are all designed theoretical values, please evaluate according to actual measurement cases.



D15A32 micromorphology
Sample numberpositiontypedetermineMeasured value(um)Upper limitfloorunitprogrammer



D15A32 micromorphologySlot 1Average thicknessUp to standard6.30776100000umreal


Controller model: H4UC
D15A32 micromorphologySlot 1Average thicknessUp to standard6.33567100000umreal


Lens: D15A32
D15A32 micromorphologySlot 1Average thicknessUp to standard6.31813100000umreal


Scanning frequency: 4000HZ
D15A32 micromorphologySlot 1Average thicknessUp to standard6.3086100000umreal



D15A32 micromorphologySlot 1Average thicknessUp to standard6.31139100000umreal



D15A32 micromorphologySlot 1Average thicknessUp to standard6.32389100000umreal



D15A32micromorphologySlot 1Average thicknessUp to standard6.31218100000umreal



D15A32micromorphologySlot 1Average thicknessUp to standard6.35061100000umreal



D15A32micromorphologySlot 1Average thicknessUp to standard6.32374100000umreal



D15A32micromorphologySlot 1Average thicknessUp to standard6.31207100000umreal






repeatability0.04285









Software screenshot:



Photos:



D15A32 Static jumping
Static jitter





H4UC
D15A32
Unit:um


Repetition accuracy:0.0280.009




D15A32 roughness
H4UC-D15A32R06S2.8-3RA3.2Standard RZ12.5(um)Actual RZ12.974(um)Difference value0.474(um)


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