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2022-11-01

Spectral confocal measurement of wafer thin film thickness

As shown in the figure below: The thickness of the yellow wafer film is required to be measured

 

By understanding the needs of customers know the measurement film accuracy requirements of μm level, according to customer requirements and product observation technicians, D15A32 with H4UO one-third range controller, D15A32 has an ultra-small spot size, bringing higher linear accuracy and higher resolution, suitable for measuring the roughness of high resolution.

 

 

Through scanning measurement, it can be seen that the film thickness of 13.914μm

(Repeat accuracy)

Since its establishment in 2014, Shenzhen Liyi Technology has been specialized in the production and development of spectral confocal displacement sensors for 8 years. After 8 years of continuous product repeatability, the product can reach 10nm level, the thinest can measure 8μm, and the measurement Angle can reach ±60°.