Required height difference measurement of glass surface pattern (as shown below)

By observing the sample, it is found that the glass surface is laser carved there are three areas, and the thickness of the glass is thin, which belongs to the light can penetrate the object, so the lens D15A32 selected this time with H4UO single-channel controller, D15A32 not only the spot is extremely small, and the linear accuracy and resolution are extremely high, very suitable for things requiring high linear accuracy.

(height difference scan data)

(Repeat accuracy)

It can be seen from the above figure that the accuracy of position 1, position 2 and position 3 is about 0.15μm when measuring the height difference of glass by using our company's spectral confocal displacement sensor is about 1.28μm, 1.34μm-1.35μm, and the accuracy of position 3 is about 0.15μm, which does not include a trace of interference caused by airflow.