Spectral confocal sensor, white interferometer, laser displacement sensor, film thickness meter is currently in the field of 3D, one of the highest precision measurement instruments, the front of the vertical instrument technology has introduced the spectral confocal displacement sensor, laser displacement sensor, the next article will take you to understand the white interferometer

White light interferometer working principle:

White light interferometer is a hyperfine surface profile measuring instrument developed by using the principle of optical interference. The illumination beam is divided into two beams by the semi-reflective semi-permeable spectroscope and projected onto the sample surface and the reference mirror surface respectively. The two beams of light reflected from the two surfaces pass through the spectroscope again to synthesize a beam of light, and the imaging system forms two superimposed images on the sensitive surface of the CCD camera. Because the two beams of light interfere with each other, the interference fringes between light and dark are observed on the sensitive surface of the CCD camera. The brightness of the interference fringe depends on the difference of optical path between the two beams. The relative height of the measured sample can be determined according to the brightness of the white light interference fringe and the position of the interference clause.

It has the advantages of high measurement accuracy, convenient operation, complete functions, and wide coverage of measurement parameters. The process of measuring a single fine device takes less than 2 minutes to ensure high model rate detection. The special light source mode of white light interferometer can be widely applied to the measurement of various fine device surfaces from smooth to rough.

Application fields of white light interferometer:

First, hyperfine roughness measurement

Glass lens 0.05nm roughness measurement

Second, step height

Mask step height measurement

Iii. Morphology observation & measurement

Film topography measurement

4. Comparison and measurement of experimental morphology under different conditions

 Droplet morphology analysis of chemical materials with different concentrations

After listening to the introduction of Vertical instrument technology, I believe you have a general understanding of the principle and application field of white light interferometer. Vertical Instrument Technology is a company specializing in the production of spectral confocal displacement sensors, laser displacement sensors, film thickness meters and white light interferometers. Since its establishment in 2014, it has been committed to becoming a domestic technology leader in high-precision measurement.